엔에이티엠(주)

Model No.	ALD-200	ALD-500
Description	Wafer sizexQ’ty : 4 inchx10Sht.	Wafer sizexQ’ty : 4 inchx15Sht.
Plasma Source.	RF = 1,000 W : 1 ea RF frequency : 13.56 MHz * Option Item	RF = 1,500 W : 1 ea RF frequency : 13.56 MHz * Option Item
Source Diameter	Φ 150 mm, Multi Stage	200 mm, Multi Stage
Source hight	122.0 mm	122.0 mm
Degree of Angle	O Degree, Planar type	O Degree, Planar type
Type	Vertical & Upper Door open / close by pneumatic cylinder	Vertical & Upper Door open / close by pneumatic cylinder
Chamber size	Φ 200 x 95H in mm.	Φ 200 x 170H in mm.
Outer Case size	1325L x 600W x 1298H	1800L x 900W x 2033H
Construction Materials	SUS 304	SUS 304
Vacuum rate	5 x 10E6 Torr.	5 x 10E6 Torr.
Substrate Temp.	300 ~ 5000℃	300 ~ 500℃
Substrate Rotation	N / A(Not Applicable)	N / A(Not Applicable)
Z axis Adjust	N / A(Not Applicable)	N / A(Not Applicable)
Argon gas feed	200 SCCM	300 SCCM
Precursor Quantity	4 ea with Heating Mantle	4 ea with Heating Mantle
Carrier	Nitrogen, Oxygen, Hydrogen	Nitrogen, Oxygen, Hydrogen
Power Rating	220 / 380 VAC, 3 Phase, 60 Hz, 45 kW	220 / 380 VAC, 3 Phase, 60 Hz, 55 kW

Model No.	PECVD-014-8	PECVD-018-10
Description	Substrate size : 8 inch	Target size : 10 inch
Sputter Source.	RF = 1,000 W : 1 ea RF frequency : 13.56 MHz	RF = 1,500 W : 1 ea RF frequency : 13.56 MHz
Source Diameter	Φ 250 mm, Multi Stage	Φ 300 mm, Multi Stage
Source hight	122.0 mm	122.0 mm
Degree of Angle	O Degree, Planar type	0 Degree, Planar type
Type	Vertical & Upper Door open / close by pneumatic cylinder	Vertical & Upper Door open / close by pneumatic cylinder
Chamber size	Φ 14 inch	Φ 18 inch
Construction Materials	SUS 304	SUS 304
Vacuum rate	5 x 10E6 Torr.	5 x 10E6 Torr.
Substrate Temp.	300 ~ 8000℃	300 ~ 800℃
Substrate Rotation	10 ~ 40 mm	0 ~ 20 rpm
Z axis Adjust	200 SCCM	10 ~ 50 mm
Argon gas feed	200 SCCM	300 SCCM
Power Rating	220/380 VAC, 3 Phase, 60 Hz, 45 kW	220/380 VAC, 3 Phase, 60 Hz, 55 kW

Model No.	RF/DC – C – 018 - 2	RF/DC – C – 020 - 4
Description	Target size : 2 inch	Target size : 4 inch
Sputter Source.	DC = 1,200 W : 1 ea RF = 800 W : 2 ea RF frequency : 13.56 MHz	DC = 1,500 W : 1 ea RF = 1,000 W : 2 ea RF frequency : 13.56 MHz
Source Diameter	Φ 88.9 mm	Φ 140.3 mm
Source hight	122.0 mm	122.0 mm
Degree of Angle	120 Degree Dividing	120 Degree Dividing
Magnet	Nd-Fe	Nd-Fe
Type	Vertical & Upper Door open / close by pneumatic cylinder	Vertical & Upper Door open / close by pneumatic cylinder
Chamber size	Φ 18 inch	Φ 20 inch
Construction Materials	SUS 304	SUS 304
Vacuum rate	5 x 10E6 Torr.	5 x 10E6 Torr.
Substrate Temp.	300 ~ 1,000℃	300 ~ 1,000℃
Substrate Rotation	0 ~ 20 rpm	0 ~ 20 rpm
Z axis Adjust	10 ~ 40 mm	10 ~ 50 mm
Argon gas feed	100 SCCM	150 SCCM
Power Rating	220 / 380 VAC, 3 Phase, 60 Hz, 45 kW	220 / 380 VAC, 3 Phase, 60 Hz, 55 kW

Model No.	RF / DC-P-012	RF / DC-P-014	RF / DC-P-016	RF / DC-P-016
Description	Target Dia. 1“	Target Dia. 2“	Target Dia. 3“	Target Dia. 4“
Max. Thick.	3.2 mm	6.3 mm	9.5 mm	9.5 mm
Max. power	DC = 150 W RF = 150 W	DC = 700 W RF = 500 W	DC = 1,200 W RF = 800 W	DC = 1,500 W RF = 1,000 W
Argon gas Supply	50 SCCM	75 SCCM	100 SCCM	150 SCCM
Cooling W’tr	O.5 L/m	1.7 L/m	2.3 L/m	3 L/m
Surce Dia.	45.7 mm	88.9 mm	117.6 mm	143.0 mm
Source Hight	38.1 mm	122.0 mm	122.0 mm	122.0 mm
Chamber size	Φ12 inch	Φ14 inch	Φ16 inch	Φ16 inch
Construction Materials	SUS 304	SUS 304	SUS 304	SUS 304
Type	Vertical, Upper door Pneumatic Cylinder ope / close	Vertical, Upper door Pneumatic Cylinder ope / close	Vertical, Upper door Pneumatic Cylinder ope / close	Vertical, Upper door Pneumatic Cylinder ope / close
Vacuum rate	5 x 10E6 Torr.	5 x 10E6 Torr.	5 x 10E6 Torr.	5 x 10E6 Torr.
Substrate Temperature	200 ~ 1,000 ℃	200 ~ 1,000 ℃	200 ~ 1,000℃	200 ~ 1,000℃
Substrate Rotation	0 ~ 20 rpm	0 ~ 20 rpm	0 ~ 20 rpm	0 ~ 20 rpm
Z axis adjust	10 ~ 30 mm	10 ~ 40 mm	10 ~ 50 mm	10 ~ 50 mm
Power rating	220 / 380 VAC, 3 P, 60 Hz, 25 kW	220 / 380 VAC, 3 P, 60 Hz, 30 kW	220 / 380 VAC, 3 P, 60 Hz, 35 kW	220 / 380 VAC, 3 P, 60 Hz, 40 kW